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Proceedings Paper

Theory and experiments of the one-mirror-inclined three-mirror-cavity photodetectors
Author(s): Hui Huang; Yuan Zhong; Qi Wang; Yongqing Huang; Xiaomin Ren
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Paper Abstract

Research on the one-mirror-inclined three-mirror-cavity (OMITMC) photodetectors in our laboratory is reported. In the structure of the photodetectors, it is the inclined- mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, high-speed and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis, we do realize the vertical taper structure, the key part in the whole integrated device, by dynamic etch mask technique. Moreover, the first integrated device of this type was fabricated. A spectral response linewidth less than 6nm and a quantum efficiency of 52.6% have been achieved experimentally.

Paper Details

Date Published: 19 October 2001
PDF: 5 pages
Proc. SPIE 4580, Optoelectronics, Materials, and Devices for Communications, (19 October 2001); doi: 10.1117/12.444924
Show Author Affiliations
Hui Huang, Beijing Univ. of Posts and Telecommunications (China)
Yuan Zhong, Beijing Univ. of Posts and Telecommunications (China)
Qi Wang, Beijing Univ. of Posts and Telecommunications (China)
Yongqing Huang, Beijing Univ. of Posts and Telecommunications (China)
Xiaomin Ren, Beijing Univ. of Posts and Telecommunications (China)


Published in SPIE Proceedings Vol. 4580:
Optoelectronics, Materials, and Devices for Communications
Tien Pei Lee; Qiming Wang, Editor(s)

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