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Proceedings Paper

Fabrication of microstamps used for oligonucleotide array synthesis
Author(s): Pengfeng Xiao; Nongyao He; Zhengchun Liu; Quanguo He; Jiqing Xu; Zuhong Lu
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Paper Abstract

A polydimethylsiloxane (PDMS) stamp with well-defined features on its surface was fabricated through soft lithography. First, we intended to increase the molecular interaction between the PDMS materials and its supporting substrate through surface modification with self-assembly technique. A silane molecular monolayer has been produced on a glass plate by treatment with 5% (CH3)2SiCl2 in CH3Cl. Secondary, we optimized the thickness of the PDMS stamps between 6x10-4m and 1.0x10-3m, and the feature highness 1.5x10-5m, and thus the stamp shrinkage could be controlled within 0.0417% in linearity or within 0.286% in area, respectively. Third, we modified the surface of the master through chemical plating silver or aluminum to prevent the PDMS from sticking to the master surface. During curing process of the stamp fabrication, PDMS intends to shrink towards the silanized glass plate from the master surface, which helps to peel stamp from the master without damaging its features.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444750
Show Author Affiliations
Pengfeng Xiao, Southeast Univ. (China)
Nongyao He, Southeast Univ. (China)
Zhengchun Liu, Southeast Univ. (China)
Quanguo He, Southeast Univ. (China)
Jiqing Xu, Nanjing E-life Gene Medicine Co., Ltd. (China)
Zuhong Lu, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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