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Proceedings Paper

Micromachined tunable rf capacitor with comb structure
Author(s): Yufeng Jin; Haixia Zhang; Min Miao; Kun Tang; Zhihong Li
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Paper Abstract

A micromachined tunable RF capacitor with interdigitated comb plate structure is investigated in this paper. Much effort to improve tuning ratio, such as minimizing parasitical capacitance, is presented. Analysis shows the bias voltage can be lowered through the optimization of the structure parameters. Also presented is the fabrication of this capacitor based on typical bulk silicon micromachining technology.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444745
Show Author Affiliations
Yufeng Jin, Peking Univ. (Singapore)
Haixia Zhang, Peking Univ. (China)
Min Miao, Peking Univ. (China)
Kun Tang, Peking Univ. (China)
Zhihong Li, Peking Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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