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Proceedings Paper

Analysis of a novel MEMS electrostatic comb actuator for optical switching
Author(s): Pei-dong Yu; Guozhong Wang; Minghua Chen; Shizhong Xie
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Paper Abstract

Till now, the MEMS switches that have been mostly developed are based on moving micro-mirrors arrays for free-space switching and electrostatic comb drive actuators are widely used because of their simple construction and reliable operation. Here, we report the analysis of a novel MEMS electrostatic comb actuator for optical switching, which can be made with surface micro-machining, and get the performance optimization with high side stability, large displacement and low driving voltage. At the same time, finite element analysis has been used to verify the accuracy of the novel fabric model developed. We have validated the analytical model of the novel electrostatic comb actuators theoretically and numerically.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444744
Show Author Affiliations
Pei-dong Yu, Tsinghua Univ. (China)
Guozhong Wang, Tsinghua Univ. (China)
Minghua Chen, Tsinghua Univ. (United States)
Shizhong Xie, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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