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Proceedings Paper

All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source
Author(s): Xuefeng Wang; Xiangzhao Wang; Caini Zhang; Danyang Yu; Gaoting Chen
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Paper Abstract

In this paper, we proposed a new all fiber laser diode sinusoidal phase-modulating interferometer insensitive to the intensity change of light source. In a laser diode interferometer with a photothermal modulation, intensity modulation of the laser diode is negligible, but the maximum frequency of the photothermal modulation is less than that of injection current modulation. And beam diameter is too large to be used to measure some minute objects such as some components in micro-electro-mechanical system. In this paper, we proposed an all fiber interferometer, in which the effect of the intensity change of the laser diode on measurement is eliminated. The diameter of the light beam is only 0.5 mm. Using this interferometer, we measured displacements of a piezoelectric transducer. The measurement repeatability is less than 1 nanometer.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444742
Show Author Affiliations
Xuefeng Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Caini Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Danyang Yu, Shanghai Univ. (China)
Gaoting Chen, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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