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Proceedings Paper

Design of thin-film-based microgrippers
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Paper Abstract

In this paper, we present the results of theoretical study of thin film technique based micro grippers. Three most popular actuation mechanisms, namely, piezoelectric, bimetal and shape memory alloy are investigated. First, we present the simulation results against the measured behavior of NiTi shape memory alloy thin film based micro grippers. Then we compare the performances of these three kinds of micro grippers. It shows that shape memory alloy based micro gripper is much better than the others.

Paper Details

Date Published: 15 October 2001
PDF: 8 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444741
Show Author Affiliations
Weiming Huang, Nanyang Technological Univ. (Singapore)
Xiangyang Gao, Nanyang Technological Univ. (Singapore)
Jun Ping Tan, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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