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Proceedings Paper

Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data-storage
Author(s): Jiaru Chu; Junfeng Lu; Yicheng Wu; Wenhao Huang; Ryutaro Maeda; Toshihiro Itoh; Tadatomo Suga
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Paper Abstract

In order to deal with problems in SFM-based data storage, such as low data rate and tip stabilities, we designed and fabricated a micro cantilevers array based on Pb(Zr, Ti)O3 (PZT) thin films. The data rate can be improved by parallel operation using the cantilevers array. And the tip wearing can be slowed down by a thermal mechanical writing mechanism using micro-heaters integrated on the tips, also taking advantage of the independent active tip-sampling spacing control by applying different DV bias to each PZT cantilever. The PZT film was prepared by a modified sol-gel process and electrostatic-spray coating method. The prototype of cantilevers array has been fabricated and characterized. With such a device, data bits with size of about 50nm was recorded and readout in the experiments.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444739
Show Author Affiliations
Jiaru Chu, Univ. of Science and Technology of China (China)
Junfeng Lu, Univ. of Science and Technology of China (China)
Yicheng Wu, Univ. of Science and Technology of China (China)
Wenhao Huang, Univ. of Science and Technology of China (China)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Toshihiro Itoh, Univ. of Tokyo (Japan)
Tadatomo Suga, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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