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Proceedings Paper

Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching
Author(s): Yuzhai Pan; Yongqiang Ning; Li Qin; Hui Suo; Yun Liu; Lijun Wang
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Paper Abstract

The semiconductor microcylinder lasers with whispering-gallery modes are expected to be with execllent performances, such as low threshold current density and high efficiency. The spontaneous emission characteristics of microcylinder laser due to microcavity effect is strongly modified. Another excellence of whispering-gallery mode devices is that the probability of planar integration with waveguide devices and detectors. In this work InGaAs/InGaAsP microcylinder laser was fabricated by wet chemical etching. The diameter of the microcylinder is about 10micrometers or 5micrometers . With our improved processing the microcylinder was with smooth side wall, ensuring high Q-factor. The lasing at about 1.5micrometers was observed at low temperature.

Paper Details

Date Published: 15 October 2001
PDF: 3 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444735
Show Author Affiliations
Yuzhai Pan, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Yongqiang Ning, Lab. of Excited State Processes (China)
Li Qin, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Hui Suo, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Yun Liu, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Lijun Wang, Lab. of Excited State Processes (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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