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Proceedings Paper

Micromachined optical switch with a vertical SU-8 mirror
Author(s): Suyan Liu; Minqiang Bu; Xiongying Ye; Zhaoying Zhou; Dacheng Zhang; Ting Li; Yilong Hao; Zhimin Tan
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Paper Abstract

In this paper, a novel surface micromachined optical switch with a micro vertical SU-8 mirror is reported. Using stress-induced bending of a polysilicon/silicon nitride bimorph beam, a vertical mirror is raised above the substrate. The beam with the mirror is attracted to the substrate by applying a voltage to switch the transmission state to the reflection state of the optical switch. The mirror displacement is about 250 micrometers . The roughness of the sidewall of the gold-coated SU-8 mirror is measured to be 53.5 A for the average roughness (Ra) and 71.3 A for the root mean square (rms). The verticality of the SU-8 mirror is 89.1 degree(s). The insertion loss is measured to be 2.9 dB in the transmission state and 4.1dB in the reflection state for multi-mode fibers. The structure of the switch provides us a possibility of expanding to a large matrix of optical switches.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444734
Show Author Affiliations
Suyan Liu, Tsinghua Univ. (China)
Minqiang Bu, Tsinghua Univ. (China)
Xiongying Ye, Tsinghua Univ. (China)
Zhaoying Zhou, Tsinghua Univ. (China)
Dacheng Zhang, Tsinghua Univ. (China)
Ting Li, Tsinghua Univ. (China)
Yilong Hao, Tsinghua Univ. (China)
Zhimin Tan, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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