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Proceedings Paper

Position sensor in micro-electro-mechanical systems using a self-mixing laser diode
Author(s): Ming Wang; Shouping Nie
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Paper Abstract

Many optical sensors for the displacement measurement in sub-micron have been developed. In this paper, we propose a new type of self-mixing interferometry (SMI) to measure microscopic displacement in microelectromechanical systems(MEMS). The phase of SMI signal is modulated with external cavity length and demodulated by signal analysis technique. The experimental system was developed to have a sensitivity of several nanometers for displacement sensing.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444733
Show Author Affiliations
Ming Wang, Nanjing Normal Univ. and Nanchang Univ. (China)
Shouping Nie, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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