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Proceedings Paper

Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
Author(s): Xiulan Cheng; Dong Xu; Jian Chen; Bingchu Cai; Guifu Ding
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Paper Abstract

TiNi/Si diaphragm is a useful selection for reciprocating motion microactuator, since it needn't complex bias structure and special thermal-mechanical training. The TiNi/Si actuating diaphragm with patterned TiNi resistance strip can improve the dynamic response effectively. The several kinds of pattern of TiNi thin films with various shapes and sizes were designed and processed, and the influences of patterning and Si thickness on the characteristics of phase transformation were analyzed by measuring electrical resistance-temperature curves. Moreover, the stress distributions and maximum deflections of TiNi/Si diaphragms with different Si thickness were simulated by FEA. The results show that the phase transformation behaviors of the TiNi thin films with different Si thickness and various patterns are different. Based on these results, optimized actuating diaphragm with patterned TiNi/Si structure was developed. The thermal actuating results are agreed with simulating results of FEA.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444730
Show Author Affiliations
Xiulan Cheng, Shanghai Jiao Tong Univ. (China)
Dong Xu, Shanghai Jiao Tong Univ. (China)
Jian Chen, Shanghai Jiao Tong Univ. (Singapore)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)
Guifu Ding, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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