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Proceedings Paper

Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor
Author(s): Ming Qin; Qing-An Huang; Zhao-Yong Zhang; Xianwei Yan
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Paper Abstract

A new micromachined thermal anemometer based on laterally polysilicon diode (LPD) temperature-sensing elements is developed in the paper. The LPD was fabricated with CMOS compatible process and its temperature-sensing characterization is also investigated. The measured results show the forward current increases with temperature near linearly. The temperature coefficient is about 1.8mV/K, which is close to that of monocrystalline silicon diode. A anemometer with a ring-like polysilicon heater and 8 LPD temperature-sensing elements were fabricated and characterized, air flow up to 120 cm3/s was measured and more than 8 directions of wind can be detected.

Paper Details

Date Published: 15 October 2001
PDF: 4 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444729
Show Author Affiliations
Ming Qin, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)
Zhao-Yong Zhang, Southeast Univ. (China)
Xianwei Yan, Southeast Univ. (China)

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

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