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Proceedings Paper

Micromachined variable capacitors with laterally positioned suspended plates
Author(s): Qingquan Liu; Qing-An Huang
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Paper Abstract

A micromachined variable capacitor consisting of a suspended plate and a bottom plate fixed on the substrate is proposed as an alternative to vertically movable micromachined capacitors used for wireless communication systems. The suspended plate is driven laterally by thermal actuator arrays. The overlapped area of the two plates is changed so that the capacitance is tuned by an input voltage less than 4 V. Finite element method is used here to analyze the device. The capacitor exhibits a variation from 5.6 fF to 10.3 fF. For getting a capacitance large enough for radio frequency (RF) applications, the plates are periodically arranged to build an array. The capacitance of the array is tuned from 0.58 pF to 0.78 pF. In order to improve the linearity and increase the variation range, design modifications are made.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444725
Show Author Affiliations
Qingquan Liu, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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