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Proceedings Paper

Forces balance of micromachined accelerometer
Author(s): Yulie Wu; Xuezhong Wu; Shengyi Li
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Paper Abstract

For capacitive micromahcined accelerometers, in order to measure external acceleration, forces balance is usually introduced in the device. According to the conditioning circuitry adopted, this paper identifies three kinds of forces balance in the micromahcined accelerometer, namely, elastic forces balance, electrostatic forces balance and combination forces balance. Their performances such as linearity and frequency response are analyzed respectively

Paper Details

Date Published: 15 October 2001
PDF: 4 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444721
Show Author Affiliations
Yulie Wu, National Univ. of Defense Technology (China)
Xuezhong Wu, National Univ. of Defense Technology (China)
Shengyi Li, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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