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Proceedings Paper

Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique
Author(s): Di Chen; Min Tang; Zhimin Wang; Changmin Li; Zhiping Ni; Di Zhou
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Paper Abstract

DEM (Deepetching, Electroforming and Microreplication) technique is a new three-dimensional micro fabrication technique for non-silicon materials developed by present authors. This technique has the advantages of lower cost and shorter process period than LIGA technique. In the present research, we developed micro flowmeters and microlenses using DEM technique. The chambers of micro flowmeters have a thickness of 160 microns and the diameters of micro impellers were from 0.5 to 2 mm. The micro flowmeter chambers were from transparent polymers and fabricated using microreplication process. DEM technique offers a new way for fabrication of MEMS and MOEMS components.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444717
Show Author Affiliations
Di Chen, Shanghai Jiao Tong Univ. (China)
Min Tang, Shanghai Jiao Tong Univ. (China)
Zhimin Wang, Shanghai Jiao Tong Univ. (China)
Changmin Li, Shanghai Jiao Tong Univ. (China)
Zhiping Ni, Shanghai Jiao Tong Univ. (China)
Di Zhou, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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