Share Email Print

Proceedings Paper

Structural optimization of NiTi/Si diaphragm used in micropumps
Author(s): Li Wang; Jian Chen; Dong Xu; Bingchu Cai
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Thin film shape memory alloy microactuators are the promising devices in MEMS. A kind of simple and effective micropump driven by bimorph thin film NiTi/Si diaphragm has been fabricated in our laboratory. This paper presents the optimization of the diaphragm structure with the finite element analysis package ANSYS. Maximum actuation deflections and stress distributions of five kinds of typical structures are analyzed. Simulation results show that patterned NiTi strips should be placed in the center of the silicon membrane to get uniform stress distribution, and there is an optimized distance between the boundaries of NiTi and Si to get maximum actuation deflection. The stress variances of NiTi films and silicon membranes in optimized structure during driving processes are limited in the range of elastic strain, which means the optimized NiTi/Si diaphragm structure has excellent actuation lifetime.

Paper Details

Date Published: 15 October 2001
PDF: 8 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444716
Show Author Affiliations
Li Wang, Shanghai Jiao Tong Univ. (China)
Jian Chen, Shanghai Jiao Tong Univ. (Singapore)
Dong Xu, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

© SPIE. Terms of Use
Back to Top