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Proceedings Paper

Measurement of heat capacity of SnO2 thin films using micro-hotplate
Author(s): Jun Yu; Zhenan Tang; Guangfen Wei; Philip C.H. Chan
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Paper Abstract

Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2 thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4 membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 degree(s)C/s, and with TDSC technique, heat capacity of SnO2 thin film with thickness of 300nm is measured at temperature ranging from room temperature to 400K.

Paper Details

Date Published: 15 October 2001
PDF: 4 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444709
Show Author Affiliations
Jun Yu, Dalian Univ. of Technology (China)
Zhenan Tang, Dalian Univ. of Technology (China)
Guangfen Wei, Dalian Univ. of Technology (China)
Philip C.H. Chan, Hong Kong Univ. of Science and Technology (Hong Kong)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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