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Proceedings Paper

Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
Author(s): Guifu Ding; Yi Zhang; Chunsheng Yang; Xiaolin Zhao; Aibin Yu; Tianhui Shen
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Paper Abstract

Many kinds of bulk hydrogen absorbing alloys undergo dramatic volume expansion when they absorb hydrogen. The maximum volume change varies with substances in the range of several to over twenty percents. Based on these phenomena, a new type of electrochemical microactuator has been designed. Bilayers of hydrogen absorbing alloy and nickel can generate a large bending and deliver high force, and it can work at very low voltage. As the first prototype, MmNi5 alloy film was chosen as the actuating medium, and it is deposited by sputtering method. The principle of this new microacturator and the microfabricating process of this bimorph are presented.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444707
Show Author Affiliations
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Yi Zhang, Shanghai Jiao Tong Univ. (China)
Chunsheng Yang, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Aibin Yu, Shanghai Jiao Tong Univ. (China)
Tianhui Shen, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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