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Proceedings Paper

Design and simulation of a multifinger micromechanical silicon accelerometer
Author(s): Jing-Xin Dong; Jun-Hua Qin
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Paper Abstract

A kind of micromechanical silicon accelerometer with medium low performance designed for either commercial or military markets is described in this paper. Its sensitive element is a multi-finger micromechanical structure and its sensitive direction is parallel to the proof mass, which is fixed to the base through four folded beams. The accelerometer is simulated through the structural analysis software ANSYS in the paper. The first four modes are obtained. The first mode displays the parallel shift in the horizontal direction of the proof mass plane, which is the needed form of motion. Its harmonic frequency is simulated as 2.521KHz. This paper discusses emphatically the differences of the accelerometerí»s natural frequency and mechanical behavior, caused by the changes of the folded beamí»s parameters, by the method of finite element analysis. In the end, a performance-satisfied accelerometer example is described. The size of its central chip is 1.6mmí+1.0mm, its measuring range is 30g and its resolution is 0.5x10-3g.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444703
Show Author Affiliations
Jing-Xin Dong, Tsinghua Univ. (China)
Jun-Hua Qin, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

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