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Proceedings Paper

Phase detection scheme of vibratory gyroscope by 2D driving operation
Author(s): Heng Yang; Minhang Bao; Hao Yin; Shaoqun Shen; Bin Xiong
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Paper Abstract

Conventionally, a one-dimensional vibratory gyroscope is excited into vibration int the x-direction and detection is made for an angular rate around the z-axis by measuring the induced vibration in the y-direction. Proposed in this paper is a novel operation mode. In this operation mode, excitation is made in both the x- and y-directions and the angular rate around the z-axis causes the phase variation of the vibrations. Therefore, the angular rate signal can be detected by measuring the phase change of the output signal of the gyroscope in one of the directions. This operation scheme features high accuracy, high immunity against interference and low temperature coefficient. A bulk micromachined gyroscope with piezoresistive sensing elements is used as a test carrier for the two-dimensional excitation operation and phase detection scheme. Experimental results are presented.

Paper Details

Date Published: 15 October 2001
PDF: 7 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444696
Show Author Affiliations
Heng Yang, Fudan Univ. (Netherlands)
Minhang Bao, Fudan Univ. (China)
Hao Yin, Fudan Univ. (China)
Shaoqun Shen, Fudan Univ. (China)
Bin Xiong, Shanghai Institute of Metallurgy (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

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