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Proceedings Paper

Experiments and a new model on damping in rare air
Author(s): Hao Yin; Minhang Bao; Heng Yang; Shaoqun Shen; Bin Xiong
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Paper Abstract

Presented in this paper is an experimental study of squeeze- film air damping in rare air. Experimental beam-mass devices with different gap distances have been designed and fabricated for the experiments and a glass apparatus has been design and set up for measurement in quality factor in low pressure range. The piezoresistive bridge on the beam facilities the measurements of quality factor in vacuum. The pressure coverage in the study is in the range of 105 Pa to below 0.1Pa. The experimental results of quality factor do not agree well with the existing model proposed by Christian, but agree much better with a new model using energy transfer scheme instead of the momentum exchange scheme used by Christian.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444694
Show Author Affiliations
Hao Yin, Fudan Univ. (China)
Minhang Bao, Fudan Univ. (China)
Heng Yang, Fudan Univ. (Netherlands)
Shaoqun Shen, Fudan Univ. (China)
Bin Xiong, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

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