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Proceedings Paper

Magnetically actuated MEMS variable optical attenuator
Author(s): Wenjun Li; Xiaolin Zhao; Bingchu Cai; Guangya Zhou; Mingsheng Zhang
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Paper Abstract

A novel magnetically driven single mode fiber micro-electro-mechanical systems (MEMS) variable optical attenuator operating in the 1550-nm wavelength region is described. The device consists of a planar coil type electromagnetic microactuator, a ferronickel attenuation vane, and fiber alignment components with V-shaped grooves. The microactuator consists of a silicon spring, a planar coil, and permalloy membrane. The planar coil was fabricated by high aspect ratio photolithography and mask-plating process. The silicon spring and the fiber alignment components were fabricated by reactive ion etching and by the silicon anisotropic etching process. A new technique, termed non-silicon surface micromachining, was used to fabricate the attenuation vane, which uses copper layer as the sacrificial layer, and the electroplated ferronickel as the structure layer. The magnetic, mechanical and optical characteristics of the attenuator were theoretically analyzed and simulated. The MEMS attenuator has less than 3-dB fiber-to-fiber insertion loss at 1550-nm wavelength, greater than 40-dB dynamic range, and better than 40dB return loss.

Paper Details

Date Published: 15 October 2001
PDF: 8 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444689
Show Author Affiliations
Wenjun Li, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)
Guangya Zhou, Shanghai Jiao Tong Univ. (China)
Mingsheng Zhang, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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