Share Email Print
cover

Proceedings Paper

Mechanics characteristics of an electrostatic optical switch
Author(s): Yuan Luo; Yi Zhang; Shanglian Huang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Optical switch is one of key supporting technologies in all-optical-network (AON) and electrostatic MEMS (Micro-Electro-Mechanical Systems) optical switch plays a very important role in the research of all-optical switch. The mechanics characteristics of the very thin beam and the micro-mirror in the structure of the electrostatic switch will influence the reliability and power consumption of the switch. In this paper, the relation between the sizes of the structure and the mechanics performance of the optical switch is discussed and simulated. In order to have high reliability, optimization designing of the beam and micro-mirror must be taken into account.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444687
Show Author Affiliations
Yuan Luo, Chongqing Univ. and Chongqing Univ. of Posts & Telecommunications (China)
Yi Zhang, Chongqing Univ. of Posts & Telecommunications (China)
Shanglian Huang, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

© SPIE. Terms of Use
Back to Top