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Proceedings Paper

Polymer and glass etching by ArF and XeCl excimer lasers
Author(s): Qihong Lou; Lin Zhang
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Paper Abstract

In this paper, a fast process of fabrication of diffractive optical elements by excimer laser ablation of polymer films is mainly described. For fabrication of a two-level diffractive element, fewer steps and less time are needed.

Paper Details

Date Published: 15 October 2001
PDF: 4 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444685
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Lin Zhang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices

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