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Proceedings Paper

Preparations of Zr-rich PZT thin film on YBCO electrode and investigation of ferroelectric properties
Author(s): Runling Peng; Ping Wu
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Paper Abstract

Pb(ZrxTi1-x)O3(PZT) films have excellent ferroelectric, optical, piezoelectric and pyroelectric properties. We prepared PZT thin films by pulsed laser deposition (PLD). A pulsed 3321 mbar KrF excimer laser was used to ablate the bulk targets. In this work, sintered targets of Pb(Zr0.94Ti0.06)O3 is used to deposit ferroelectric film onto YBCO and LAO underlayers at 570 degrees Celsius. The X-ray diffraction (XRD) pattern shows that the PZT film is of the perovskite structure having the remarkable (00k) orientation. The polarization-voltage (P-V) characteristic of the PZT thin film is measured by the Virtual Ground Mode. The remnant polarization and coercive field have been found to be Pr equals 4.7 (mu) C cm-2 and Vc equals 0.4 V for Pt/YBCO/PZT/ALO.

Paper Details

Date Published: 15 October 2001
PDF: 4 pages
Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444671
Show Author Affiliations
Runling Peng, Nanjing Univ. of Aeronautics and Astronautics (China)
Ping Wu, Nanjing Univ. of Aeronautics and Astronautics (China)

Published in SPIE Proceedings Vol. 4600:
Advances in Microelectronic Device Technology

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