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Proceedings Paper

Tunable F-P optical filter based on microcavity structure
Author(s): Min Chen; Xu Liu; Haifeng Li
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Paper Abstract

F-P optical thin film filter based on glass was designed and built using thin film coating and RIE technology. Photoresist was the sacrificial layer and later was removed by dry etching.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444670
Show Author Affiliations
Min Chen, Zhejiang Univ. (China)
Xu Liu, Zhejiang Univ. (China)
Haifeng Li, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4600:
Advances in Microelectronic Device Technology

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