Share Email Print

Proceedings Paper

Open loop method for waveform acquisition on electron-beam probe systems
Author(s): Hui Wang; Hiroyasu Koike; Masayoshi Ikeda; Kenichi Kanai
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Closed loop waveform acquisition methods on electron-beam probe systems have been used for many years. Its stability and linearity make it reliable and accurate to quantitatively measure the voltage at a probe point on the device under test (DUT). However, the feedback loop keeps decreasing the charging current to the integrator hence slowing the acquisition process. The open loop method can keep the charging current constant so as to speed up the waveform acquisition. Fast acquisition is desirable for productivity and to minimize electron beam induced contamination of the probe-point. By adjusting the loop gain and the filter mesh voltage properly, we developed a method to use the characteristics of the local linearity of S curve to make the open acquisition loop stable and reliable while significantly boosting the acquisition speed. The results show it can be approximately 25 times faster to acquire a waveform from the DUT. Also shown, the open loop method works ideally for measuring small amplitude (<EQ 1 volt) analog signals as well as logic waveforms.

Paper Details

Date Published: 15 October 2001
PDF: 6 pages
Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444668
Show Author Affiliations
Hui Wang, Schlumberger Semiconductor Solutions (United States)
Hiroyasu Koike, Schlumberger KK (Japan)
Masayoshi Ikeda, Schlumberger Semiconductor Solutions (United States)
Kenichi Kanai, Schlumberger Semiconductor Solutions (United States)

Published in SPIE Proceedings Vol. 4600:
Advances in Microelectronic Device Technology
Qin-Yi Tong; Ulrich M. Goesele, Editor(s)

© SPIE. Terms of Use
Back to Top