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Proceedings Paper

Numerical and theoretical study of gaseous flows in a microtube
Author(s): C. Shu; X. H. Mao; Yong Tien Chew
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Paper Abstract

The 3-D axisymmetric, steady flow in a micro-tube with Kn number in the 'slip flow' regime is investigated by analytical method and DSMC (direct simulation Monte Carlo) approach. The analytical formulations are derived by dimensional analysis. Under different pressure ratios of the inlet to outlet, the streamwise velocity, nonlinear pressure distributions and volumetric flow rates along the streamwise direction are obtained analytically, which are compared with those given from DSMC computation. Good agreement was achieved. The causes of deviation in pressure distributions between analytical and DSMC results are discussed in terms of compressibility and rarefaction effects.

Paper Details

Date Published: 15 October 2001
PDF: 11 pages
Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444661
Show Author Affiliations
C. Shu, National Univ. of Singapore (Singapore)
X. H. Mao, National Univ. of Singapore (Singapore)
Yong Tien Chew, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4600:
Advances in Microelectronic Device Technology
Qin-Yi Tong; Ulrich M. Goesele, Editor(s)

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