Share Email Print

Proceedings Paper

Porous silicon optical waveguides formed by anodization process
Author(s): Zhenhong Jia
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A simpler method for the fabrication of multilayer porous silicon optical waveguides is studied in this paper. It is based on the dependence of porosity on illumination intensity during anodisation process. The influence of illumination intensity on porosity during preparing porous silicon was studied. The experimental results show that the porosity of porous silicon has a maximum value under certain illumination intensity. Porous silicon channel waveguides were obtained by controlling the illumination intensities and the anodisation time in anodisation time in anodisation process.

Paper Details

Date Published: 16 October 2001
PDF: 3 pages
Proc. SPIE 4603, Fiber Optics and Optoelectronics for Network Applications, (16 October 2001); doi: 10.1117/12.444568
Show Author Affiliations
Zhenhong Jia, Xinjiang Univ. (China)

Published in SPIE Proceedings Vol. 4603:
Fiber Optics and Optoelectronics for Network Applications
Jian Liu; Zhigong Wang, Editor(s)

© SPIE. Terms of Use
Back to Top