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Proceedings Paper

Silicon three-axial tactile probe for the mechanical characterization of microgrippers
Author(s): Sebastian Buetefisch; Ralph Wilke; Stephanus Buettgenbach
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Paper Abstract

A three-axial tactile micro probe for the investigation of the mechanical behavior of micro grippers and other micro assembly equipment has been developed using silicon micromachining technology. The sensor has been used to measure the restoring forces of flexural hinges in a micro gripper gear, to calibrate an integrated gripping force sensor, and to measure the generated forces of actuators used in micro grippers. The tactile micro probe is an advancement of a 3-D force sensor presented earlier.

Paper Details

Date Published: 8 October 2001
PDF: 7 pages
Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444145
Show Author Affiliations
Sebastian Buetefisch, Technical Univ. of Braunschweig (Germany)
Ralph Wilke, Technical Univ. of Braunschweig (Germany)
Stephanus Buettgenbach, Technical Univ. of Braunschweig (Germany)


Published in SPIE Proceedings Vol. 4568:
Microrobotics and Microassembly III
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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