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Proceedings Paper

New pneumatically actuated miniature gripper for micro assembly
Author(s): Sebastian Buetefisch; Stephanus Buettgenbach
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Paper Abstract

This paper presents a micro gripper driven by a new piston type pneumatic micro actuator. The basic structure of the micro gripper and the actuator are fabricated by silicon dry etching in a single etch step. The device consists of a pyrex-silicon-pyrex sandwich structure which was mounted by anodic bonding. Alternatively a SU8 depth lithography process was used to realise the pneumatic driven micro gripper. The assembly of various micro parts including a recently presented tactile silicon 3D-micro probe is described.

Paper Details

Date Published: 8 October 2001
PDF: 8 pages
Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444142
Show Author Affiliations
Sebastian Buetefisch, Technische Univ. Braunschweig (Germany)
Stephanus Buettgenbach, Technische Univ. Braunschweig (Germany)

Published in SPIE Proceedings Vol. 4568:
Microrobotics and Microassembly III
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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