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Proceedings Paper

Development of a microrobot-based micropositioning station: the microrobot and its position and orientation measurement method
Author(s): Sounkalo Dembele; Karima Rochdi; Patrick Sandoz; Patrice Lemoal
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Paper Abstract

The paper deals with the development of a micropositioning station that can be used in manufacturing systems, microfactories, AFM or SNOM microscopes. The central element of the station is a standing waves ultrasonic linear motor. It is a jump-stick-slip driving mechanism that can make longitudinal and lateral shiftings, and rotations in the horizontal plane. Its main merits are its ability to perform microscale displacements and to support heavy pre-loads. An adequate drive-amplifier is developed, allowing the control of the system. Even, a phase sensitive vision method is developed to sense the position and the heading angle with an accuracy better than 0.2 pixel i.e. 12 micrometers with an observed field of about 4 x 3 cm2. A personnel computer controls the whole system.

Paper Details

Date Published: 8 October 2001
PDF: 7 pages
Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444141
Show Author Affiliations
Sounkalo Dembele, Univ. de Franche-Comte (France)
Karima Rochdi, Univ. de Franche-Comte (France)
Patrick Sandoz, Univ. de Franche-Comte (France)
Patrice Lemoal, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 4568:
Microrobotics and Microassembly III
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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