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Proceedings Paper

Centering electrostatic microgripper and magazines for microassembly tasks
Author(s): Juergen Hesselbach; Stephanus Buettgenbach; Jan Wrege; Sebastian Buetefisch; Christiane Graf
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Paper Abstract

Accurate handling of microparts is one of the major tasks for an automated microproduction. The development of centering electrostatic handling devices is described. Based on a planar design common microtechnical fabrication methods were used. Therefore the gripper electrodes can easily be miniaturized and the geometric form can be adapted to the shape of the objects to be handled. The optimization of the design of the gripper was done by using the Finite Element Method. This gave the possibility to improve the centering effect and the gripping forces without increasing the operating voltage. To enable the observation of the gripped parts with a camera, a transparent substrate was used (Pyrex-wafer). This facilitates the integration of the gripper into a sensor controlled microassembly station. Futhermore first successful tests of functional models are described.

Paper Details

Date Published: 8 October 2001
PDF: 8 pages
Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444126
Show Author Affiliations
Juergen Hesselbach, Technische Univ. Braunschweig (Germany)
Stephanus Buettgenbach, Technische Univ. Braunschweig (Germany)
Jan Wrege, Technische Univ. Braunschweig (Germany)
Sebastian Buetefisch, Technische Univ. Braunschweig (Germany)
Christiane Graf, Technische Univ. Braunschweig (Germany)

Published in SPIE Proceedings Vol. 4568:
Microrobotics and Microassembly III
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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