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Proceedings Paper

PLZT-based electro-optic modules for micromachined biophotonics systems
Author(s): Yasser A. Abdelaziez; Chong Hyuk Ahn
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Paper Abstract

In this paper we present the development and characterization of Lanthanum modified Lead Zirconate Titanate (PLZT)-based Electro-optic (EO) devices for micromacined bio-photonics systems. Spatial light modulator and Dynamic programmable microlens array have been designed, fabricated and initial results have been obtained for such applications. Fully integrating light sources, detectors and dynamic filtering in recently emerging bio-photonics and Capillary Electrophoresis (CE) systems is of immediate need. An optical module that contains such devices was made using microfabrication technologies on the optically active PLZT ceramic wafer. A PLZT wafer was polished and sandwiched and bonded between 2 plastic wafers to form such optical module. Laser micromachining was implemented to etch precise, and well aligned via holes in the plastic wafers to provide windows for light sources and electrical connections to our devices. The electro-optic coefficient for the PLZT was measured in the longitudinal configuration, where light propagates in the direction of the applied field. A mathematical expression was derived for the lens effect on the far field diffraction pattern of the dynamic microlens. Such diffraction pattern can be used to measure the focal length variation with the applied voltage. Preliminary results show the variation of focal lens with the applied voltage that ranges from 50 to 300 volts.

Paper Details

Date Published: 2 October 2001
PDF: 12 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443110
Show Author Affiliations
Yasser A. Abdelaziez, Univ. of Cincinnati (United States)
Chong Hyuk Ahn, Univ. of Cincinnati (United States)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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