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Proceedings Paper

Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays
Author(s): Joerg Drescher; Herbert Balke; Hans-Achim Bahr; Guenter Milde; Gerald Gerlach
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Paper Abstract

For the example of a Lithiumtantalate (LiTaO3) sensor array, the coupled thermo-electro-mechanical fields are examined using the finite element method. The temperature distribution is computed in a preliminary thermal analysis, and the numerical results are compared with an analytical model. The calculated temperature field is used as input for a subsequent electro-mechanical analysis, wehre the thermo-elastic and the pyroelectric source terms are simulated by body forces and body charges, respectively. The investigations of various FEM-models showed, that different mechanical boundary conditions and the piezoelectric coupling of LiTaO3 influence the electric system response by only about 6...7%.

Paper Details

Date Published: 2 October 2001
PDF: 6 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443103
Show Author Affiliations
Joerg Drescher, Technische Univ. Dresden (Germany)
Herbert Balke, Technische Univ. Dresden (Germany)
Hans-Achim Bahr, Technische Univ. Dresden (Germany)
Guenter Milde, Technische Univ. Dresden (Germany)
Gerald Gerlach, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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