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Proceedings Paper

MEMS spatial light modulators with integrated electronics
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Paper Abstract

The design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) with complementary metal-oxide semimconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators is presented in this paper. A large array of piston-motion MEMS mirror segments make up the (mu) SLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination ((lambda) =1.5micrometers ). The mirror segments, or pixels, are fabricated from metal in a low temperature process allowing for vertical integration of the (mu) SLM with CMOS based, 8-bit, control electronics. Proof-of- concept results, a proposed fabrication process and, preliminary process development results are also presented.

Paper Details

Date Published: 2 October 2001
PDF: 7 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443099
Show Author Affiliations
Steven Cornelissen, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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