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Proceedings Paper

Optical performance of pivoting micromirrors
Author(s): Olga Blum Spahn; Ernest J. Garcia; Victor C. Esch; Grant D. Grossetete; Fernando Bitsie; Sita S. Mani; Jerome F. Jakubczak
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Paper Abstract

In this paper we describe optical and dynamic performance of tip/tilt micromachined mirrors fabricated using the SUMMIT V surface micromachining process. We find that the tilt angle for a given mirror design is determined by a combination of geometric factors and stiffness of the capacitive suspension. Switching speeds of ~40-50 microsecond(s) econds are measured for 50 micrometers -square mirrors. Finally surface roughness and curvature before and after metallization are obtained using white light interferometry.

Paper Details

Date Published: 2 October 2001
PDF: 10 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443097
Show Author Affiliations
Olga Blum Spahn, Sandia National Labs. (United States)
Ernest J. Garcia, Sandia National Labs. (United States)
Victor C. Esch, Sandia National Labs. (United States)
Grant D. Grossetete, Sandia National Labs. (United States)
Fernando Bitsie, Sandia National Labs. (United States)
Sita S. Mani, Sandia National Labs. (United States)
Jerome F. Jakubczak, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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