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Proceedings Paper

Optomechanical variations and control in a MOEMS switch model
Author(s): Thomas E. Plowman; Robert A. Stoll; David A. Winick; Arthur S. Morris III
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Paper Abstract

This work demonstrates how optomechanical alignment inaccuracies affect the operation of a small port-count, fiber coupled, MOEMS switch using six degrees of freedom, parameterized behavioral models. Simulation results show that a control system is essential to stabilize the switch when it is subjected to the variations that would otherwise degrade its performance.

Paper Details

Date Published: 2 October 2001
PDF: 7 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443093
Show Author Affiliations
Thomas E. Plowman, Coventor, Inc. (United States)
Robert A. Stoll, Coventor, Inc. (United States)
David A. Winick, Coventor, Inc. (United States)
Arthur S. Morris III, Coventor, Inc. (United States)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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