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Proceedings Paper

Thermal management in optical MEMS
Author(s): Joseph J. Talghader
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Paper Details

Date Published: 2 October 2001
PDF: 8 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443090
Show Author Affiliations
Joseph J. Talghader, Univ. of Minnesota/Twin Cities (United States)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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