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Proceedings Paper

Integration nanometer indicating system for reducing temperature drift of interferometer
Author(s): Jian Wu; Chunyong Yin
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Paper Abstract

The positioning system based on surface plasmon resonance (SPR) can achieve nanometer resolution and repeatility. A special retroreflector is designed that incidence angle of its first reflection surface is equal to resonance angle of SPR to implement the integrate SPR positioning system into the interferometer. At the beginning of a measurement, a zero position is determined by SPR positioning system. If there is drift during measurement, reset interferometer data to diminish drift as soon as the special retroreflector reaches the zero position. The integration interferometer is set up. Experiments show that long time uncertainty of interferometer is reduced from 60nm to 10nm. The measurement precision and stability of interferometer is increased.

Paper Details

Date Published: 2 October 2001
PDF: 8 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443084
Show Author Affiliations
Jian Wu, Tsinghua Univ. (China)
Chunyong Yin, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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