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Proceedings Paper

Improvement on the surface roughness of microlens array in the excimer laser machining process
Author(s): Shuh-Yi Wang; Chi-Sheng Huang; Hsau-Yu Chou; Tone-Yen Lee; Rang-Seng Chang
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Paper Abstract

A new process that improves the surface roughness of microlens array after the excimer laser machining is studied. The results show that the smoother surface has been fabricated by this innovatory method. The excimer laser with mask projection machining has been successfully applied for the fabrication of 2.5D micro parts. Furthermore, the workpiece dragging machining is capable of manufacturing microstructure array with curved surface by using various shape of mask. But during the machining process, the laser is cutting shoot by shoot and the material is gradually removed layer by layer. The laser marks on the curved surface of micro lens array is obvious and inevitable. This defect limits the product of dragging in real optical application. To overcome this drawback, an improved process is studied. When the desired shape of lens array was machined by the excimer laser machining, the attaching photo resist with the thickness of several micro meter is coated on the rough surface by spin coating or spraying. Then the lens array is baked to get the mirror surface. This original method combines the advantage of the higher fill factor and the smoother surface for the fabrication of micro lens array.

Paper Details

Date Published: 2 October 2001
PDF: 8 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443082
Show Author Affiliations
Shuh-Yi Wang, Precision Instrument Development Ctr. (Taiwan)
Chi-Sheng Huang, Precision Instrument Development Ctr. (Taiwan)
Hsau-Yu Chou, Precision Instrument Development Ctr. (Taiwan)
Tone-Yen Lee, National Central Univ. (Taiwan)
Rang-Seng Chang, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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