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Proceedings Paper

Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides
Author(s): Thor Bakke; Chris P. Tigges; Charles T. Sullivan
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Paper Abstract

A micro-mechanical optical switch based on lateral deflection of a waveguide is described. The switching element is a suspended silicon beam formed by deep reactive ion etching and release of silicon-on-insulator (SOI). Actuation is implemented using integrated electrostatic comb drives. Dry etched polymeric optical waveguides are post processed onto the mechanical structure. We present design, simulations, and preliminary experimental results.

Paper Details

Date Published: 2 October 2001
PDF: 8 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443078
Show Author Affiliations
Thor Bakke, Sandia National Labs. (Germany)
Chris P. Tigges, Sandia National Labs. (United States)
Charles T. Sullivan, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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