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Proceedings Paper

Self-assembly of surface-micromachined structures using electrostatic attraction
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Paper Abstract

The paper extends the work done using micro-fabricated hinges in surface micromachining to create fully 3D devices. These devices include free-space micro-optic systems and various sensors. While these applications are interesting, the assembly process is difficult. We present the basic theory and process necessary to perform the assembly using electrostatic interactions. The process is easy and reliable. We were able to lift early prototype mirrors with voltages as low as 35 volts.

Paper Details

Date Published: 2 October 2001
PDF: 11 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443076
Show Author Affiliations
Robert W. Johnstone, Simon Fraser Univ. (Canada)
M. Parameswaran, Simon Fraser Univ. (Canada)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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