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Proceedings Paper

Three-dimensional simulation of micropumps
Author(s): Yuan Xu; Yen-Peng Kong; Xuanxiong Zhang; Kui Yao; Wen On Choong; Francis Eng Hock Tay; Wen Ping Wang
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Paper Abstract

A 3D model of one type of micro pumps was supposed and analyzed using finite element method (FEM). The pump had square shape cavity and was driven by a square shape PZT component. The finite element analysis (FEA) took into consideration of the effects of PZT component dimensions, membrane thickness, pump chamber pressure and other geometric parameters. Modal analyses were also conducted. Compression ratio of the pump chamber was taken as the prime parameter for the analyses. It was found that the membrane thickness and the PZT plate thickness played major roles in determining the compression ratio. For each membrane thickness, there was always an optimum PZT plate thickness that gave the maximum compression ratio. Curves showing the relationship between the optimum PZT plate thickness and the membrane thickness at different chamber pressures were given, based on the FEA results. A set of optimum pump design parameters was proposed.

Paper Details

Date Published: 28 September 2001
PDF: 6 pages
Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443071
Show Author Affiliations
Yuan Xu, Institute of Materials Research and Engineering (Singapore)
Yen-Peng Kong, Institute of Materials Research and Engineering (Singapore)
Xuanxiong Zhang, Institute of Materials Research and Engineering (Singapore)
Kui Yao, Institute of Materials Research and Engineering (Singapore)
Wen On Choong, National Univ. of Singapore (Singapore)
Francis Eng Hock Tay, National Univ. of Singapore (Singapore)
Wen Ping Wang, CAD-IT Consultants (Singapore)

Published in SPIE Proceedings Vol. 4560:
Microfluidics and BioMEMS
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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