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Proceedings Paper

Simulations of a microvalve and a micropump
Author(s): Yuan Xu; Wen On Choong; Francis E.H. Tay; Xuanxiong Zhang; Yen-Peng Kong; Haiqing Gong
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Paper Abstract

A methodology for the simulation of a reciprocating displacement micro-pump is presented. First a check valve model was analyzed using coupled FEM to obtain the characteristics relationship between flow rate and the pressure as well as the minimum valve opening pressure. Then a model for the micro-pump actuator driven by PZT disks is proposed and simulated. The pump model takes into account the effects of chamber pressure and geometrical parameters. The maximum downward deflection of the actuating membrane is taken as the target parameter to analyze. It was found that the maximum membrane deflection could reach over 10micrometers microns, much larger than the radial displacement. This 'displacement amplification' is the underlying working principle of this kind of micro-pump. Quantitative analyses of the effects of various factors on the deflection are conducted. It is found that the thickness of the membrane has the biggest influence on the deflection. For each membrane thickness, there exists an op[t9kum PZT disk thickness that gives the maximum deflection at a particular electric field. Other factors with less influence on the deflection are also investigated. An optimum set of design parameters for the micro-pump is obtained form the analyses.

Paper Details

Date Published: 28 September 2001
PDF: 8 pages
Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443070
Show Author Affiliations
Yuan Xu, Institute of Materials Research and Engineering (Singapore)
Wen On Choong, National Univ. of Singapore (Singapore)
Francis E.H. Tay, National Univ. of Singapore (Singapore)
Xuanxiong Zhang, Institute of Materials Research and Engineering (Singapore)
Yen-Peng Kong, Institute of Materials Research and Engineering (Singapore)
Haiqing Gong, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4560:
Microfluidics and BioMEMS
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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