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Proceedings Paper

Microfluidic technology and polymer nanoimprinting
Author(s): Rafiqul Islam; Thomas Glinsner
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Paper Abstract

Technological interest in microfluidic systems have been increased day by day. This paper scans the microfluidic technology for modeling, simulation, and fabrication processes. The advantages of polymers for microfluidic devices over common MEMS processing of glass and silicon are becoming increasingly important. This is due to the biocompatible polymer surfaces, low cost production, and availability of different material properties and chemistry. Hot-embossing technology for high aspect ratio structures as well as polymer nanoimprinting for low cost manufacturing MEMS process are discussed.

Paper Details

Date Published: 28 September 2001
PDF: 6 pages
Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443065
Show Author Affiliations
Rafiqul Islam, EV Group Inc. (United States)
Thomas Glinsner, EV Group Inc. (Austria)

Published in SPIE Proceedings Vol. 4560:
Microfluidics and BioMEMS
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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