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Proceedings Paper

Development of surface micromachining technologies for microfluidics and bioMEMS
Author(s): Murat Okandan; Paul Galambos; Sita S. Mani; Jerome F. Jakubczak
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Paper Abstract

In the last decade, examples of devices manufactured with SUMMiT(TM) technology have demonstrated the capabilities of polysilicon surface micromachining. Currently we are working on enhancements to this technology that utilize additional structural layers of silicon nitride to enable Microfluidics and BioMEMS applications. The addition of the silicon nitride layers allows the fabrication of microfluidic flow channels that are transparent (allowing observation of cellular motion) and insulating (allowing the placement of polysilicon electrodes at arbitrary locations in the flow channels). The goal of this technology development effort is to ultimately provide functionality that is not feasible with other microfabrication technologies. The enhancements build on the key features of surface micromachining: manufacturability and compatibility with CMOS processing, which allow us to leverage the investment already made in the microelectronics processing technology. In this paper we will present examples of devices fabricated using this new enhanced surface micromachining technology. These devices include pumps, valves, and a cell manipulator.

Paper Details

Date Published: 28 September 2001
PDF: 7 pages
Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443052
Show Author Affiliations
Murat Okandan, Sandia National Labs. (United States)
Paul Galambos, Sandia National Labs. (United States)
Sita S. Mani, Sandia National Labs. (United States)
Jerome F. Jakubczak, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4560:
Microfluidics and BioMEMS
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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