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Proceedings Paper

Simple wireless powering scheme for MEMS devices
Author(s): Jie Wu; Victor Quinn; Gary H. Bernstein
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Paper Abstract

With recent developments in micromachining technology, fabrication of discrete microdevices is maturing; consequently, system integration is becoming an ever more important issue. One obstacle to such systems is the diverse power requirements of microdevices, especially actuators. Since some types of actuators exhibit relatively high voltage or power requirements, it is not feasible to integrate power supplies on-chip, and it is often inconvenient for the MEMS system to be tethered to interconnects for purposes of supplying power. On-chip wireless power sources can be implemented to circumvent this problem.

Paper Details

Date Published: 1 October 2001
PDF: 10 pages
Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443039
Show Author Affiliations
Jie Wu, Univ. of Notre Dame (United States)
Victor Quinn, Tabtronics Inc. (United States)
Gary H. Bernstein, Univ. of Notre Dame (United States)


Published in SPIE Proceedings Vol. 4559:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Henry Helvajian; Siegfried W. Janson; Franz Laermer, Editor(s)

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