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Proceedings Paper

Optimization, simulation, and fabrication of a microgyroscope
Author(s): Shifeng Li; Shaochen Chen
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Paper Abstract

This paper presents an optimized method for microgyroscope design. A lumped dynamic model is presented to optimize the microgyroscope performances. The parameters are categorized into function variables and style variables to reduce optimization cost. The maximum sensitivity and minimum area of the device are selected and weighted as the combined multiple objective functions. The optimization is conducted with a solver in Excel 9.5TM Finite element simulation is used to verify these optimized results. Simulation results show good agreement with the calculation. The optimized microgyroscope was fabricated. The resonant characteristic from experiment is compared with the optimized results and simulation results.

Paper Details

Date Published: 1 October 2001
PDF: 7 pages
Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443038
Show Author Affiliations
Shifeng Li, Iowa State Univ. (United States)
Shaochen Chen, Iowa State Univ. (United States)

Published in SPIE Proceedings Vol. 4559:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Henry Helvajian; Siegfried W. Janson; Franz Laermer, Editor(s)

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