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Proceedings Paper

Analysis of inertia forces influence on operation voltage of electrostatic microrelays
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Paper Abstract

An approach to calculate flat-parallel-type electrostatic microrelay operation voltage taking into account inertia forces is proposed. The versions to determine parameters influencing inertia masses acceleration are considered. Analysis of interacting factors is performed. Experimental microrelay calculation data and recommendations on inertia forces lowering are presented.

Paper Details

Date Published: 1 October 2001
PDF: 4 pages
Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443033
Show Author Affiliations
Georgy I. Efremov, Institute of Electronics (Belarus)
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)


Published in SPIE Proceedings Vol. 4559:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Henry Helvajian; Siegfried W. Janson; Franz Laermer, Editor(s)

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